• 9500B Oscilloscope Calibrator

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  • The world's highest performance, fully automated, upgradeable oscilloscope calibration workstation

    Oscilloscope calibration can be complex, time consuming and expensive. A significant amount of skilled operator interaction and interpretation is often required to complete the job, and today’s multi-channel instruments frequently mean that a great deal of lead switching is required. Even automated systems require significant manual intervention to complete elements of the most simple calibration procedures. Worse still, switching systems or multiplexers used to enable a degree of automation often contribute more errors and aberrations than the instrument being calibrated.

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The 9500B Oscilloscope Calibrator features

Automating oscilloscope calibration is possibly one of the biggest productivity enhancements that can be realised in many calibration labs. Performed manually, this work requires skilled operators to spend a substantial amount of time performing what are essentially repetitive tasks. Semi, or partial automation solutions apparently address this issue and free skilled technicians to perform more valuable tasks. However, in practice, these partial solutions present their own problems.

Over the last decade, the oscilloscope of choice has migrated from a two-channel instrument to a more complex four-channel device. When calibrating these instruments, it is necessary to move the calibrating signal from channel to channel as the procedure progresses. This can be achieved by physically moving cables, though this requires operator intervention. In high performance instruments, this may introduce additional measurement uncertainties as cables and connectors are handled. An alternative is to introduce a switching matrix to route signals, though this may result in problems with signal reflections, poor contacts and path differences that materially impact calibration uncertainties.

Active Heads and full automation

The Fluke Calibration 9500B addresses these issues, and provides true, full automation through the use of its unique Active Heads. With the 9500B, all the signals required to fully calibrate the oscilloscope are generated in detachable heads, remote from the calibrator mainframe. The heads are connected directly to the oscilloscope input without the need for additional cables. All control and switching of waveforms are performed under the control of the mainframe, yet within the head itself - typically only a matter of millimeters away from the oscilloscope input and amplifiers. With each 9500B mainframe able to control up to five heads, all the signals required to calibrate a 4-channel oscilloscope with an external trigger can be supplied, controlled and switched without operator intervention or the need for external switching.

MET/CAL® Plus Calibration Management Software

The final link in the chain of full automation is software. The 9500B Oscilloscope Calibrator can be used with Fluke Calibration’s powerful IEEE-488 (GPIB) based MET/CAL Plus automated calibration management software. While allowing you to automate the calibration process, MET/CAL also documents results, manages your calibration inventory, and allows you to develop new oscilloscope calibration procedures. Running under Microsoft Windows® and supporting multi-user networking, the software implements advanced features such as ISO 9000 compliant traceability, custom certificate and report generation, and high-level procedure programming. The result is higher workload throughput, better calibration consistency, minimization of human error, and less requirement for operator training - in short, higher quality calibration at lower cost.

Gold Support Program

To keep pace with the fast changing oscilloscope market, Fluke Calibration is continuously writing new calibration procedures. For a one-off, low-cost payment (less than it would cost you to have three or four DSO oscilloscope calibration procedures written), you can buy into our MET/SUPPORT Gold Software Support Program which gives you access to every new procedure written by Fluke’s software support team during the next 12 months. On current performance, that’s upwards of 100 new oscilloscope calibration procedures per year. And you won’t have to request updates or wait for delivery; every new procedure we write is available for download from our web site. In addition to the free procedures library, you will receive 60 days priority support to get you up and running with MET/SUPPORT Gold. You also have the option to buy into our MET/SUPPORT Gold program, which offers you various advantages, including the opportunity to download new procedures from our web site or even obtain custom written procedures. If the oscilloscope calibration procedure you require is not available and you need it quickly, we can write it for you at very competitive rates as part of our fast-track procedure writing scheme.


Protecting your investment

Over recent years, oscilloscope technology and performance levels have changed dramatically, a trend set to continue. What was considered to be a cutting edge instrument only a few years ago may now be relegated to the general purpose pool. The challenge for those chartered with maintaining a calibration facility to support these instruments is how to keep up with this rapid progress. The Fluke Calibration 9500B offers the perfect solution – full upgradeability. Today you can invest in a 9500 oscilloscope cal solution with performance at a modest 600 MHz. As your workload changes, and higher performance instruments become more important, you can upgrade performance to 1.1 GHz, 3.2 GHz and right up to 6 GHz. If you already need to work with higher performance instruments, you can jump right in at any point. If full automation is not something you need right away, begin with just a few Active Heads, or just one. As needs change, add more heads until you have the degree of automation and the level of performance that perfectly match your organisation’s daily oscilloscope calibration needs. Only Fluke Calibration’s 9500 and 9500B Oscilloscope Calibration Workstations, with their unique ‘Active Head TechnologyTM’, can provide the technology upgrade path to secure your investment in calibration equipment.

A range of mainframes

At Fluke Calibration, we recognise that we must address the highest levels of performance to maintain our undisputed leadership in the field of oscilloscope calibration. However, we also realise that not everyone needs this ultimate level of performance – not yet at least. To meet the needs of calibration labs who need more mainstream performance, Fluke Calibration offers a range of 9500B products. These are:

  • 9500B/600 600 MHz High-Performance Oscilloscope Calibration Workstation
  • 9500B/1100 1100 MHz High-Performance Oscilloscope Calibration Workstation
  • 9500B/3200 3.2 GHz High-Performance Oscilloscope Calibration Workstation

Fluke Calibration appreciates that your needs will almost certainly change in the future, and that completely replacing a fully operational piece of equipment simply to improve performance levels is not your desired approach. Therefore, any of the models listed above can be upgraded to higher performance at any time, an option which also applies if you already own one of our existing 9500 Series calibrators. We will make every effort to ensure that any future developments will also fit this upgrade philosophy.

Active Head range

Four different Active Heads further expand upgradeability options of the 9500B family. Their addition can improve performance, extend frequency range or increase automation possibilities of the 9500B Oscilloscope Calibration Workstation.

  • 9510 1.1 GHz Active Head with 500 ps pulse risetime - Compatible with all 9500B mainframes the 9510 will supply leveled sine to 1.1 GHz (or maximum frequency of the mainframe, whichever is lower). It will output pulse risetimes of 500 ps when used with any mainframe.
  • 9530 3.2 GHz Active Head with 150 ps and 500 ps pulse risetim - Compatible with all 9500B mainframes, the 9530 will supply leveled sine to 3.2 GHz (or maximum frequency of the mainframe, whichever is lower). It will output pulse risetimes selectable between 150 ps and 500 ps when used in any mainframe.
  • 9550 ultra-fast Active Head with 25 ps pulse capability - The 9550 provides pulses with rise and fall times of 25 ps that can be used for calibration of sampling oscilloscopes to 14 GHz.
  • 9560 extended 6 GHz bandwidth Active Head - The 9560 provides the 9500B with the unique ability to accurately calibrate with leveled sine function to 6 GHz, performance unmatched by any other oscilloscope calibrator. The 9560 will only generate 6 GHz when used with a 9500B/3200 mainframe or an upgraded 9500/3200. Contact Fluke Calibration if you have an existing 9500 mainframe you would like upgraded to this performance level.


Active Head TechnologyTM

Active Heads are lightweight modules measuring only 14 x 6.5 x 3 cm which connect to the 9500B mainframe through two cables – a single coaxial cable and a control umbilical. Within the head is all the circuitry needed to supply all the signals necessary to calibrate a modern, high-performance oscilloscope. This includes precision dc levels up to ±220 V; calibrated amplitude squarewaves up to 210 V pk-pk from 10 Hz to 100 kHz; leveled sinewaves from 0.1 Hz to 6 GHz (depending on head); and four different styles of timing marker from 0.2 ns to 50 s. The hybrid within the head can route even a high frequency, externally generated calibration signal to the Active Head output. The hybrid also contains sinewave amplitude sensing circuits, wideband attenuator networks, a pulse generator, an edge generator and output signal multiplexing. Key to delivering absolute performance is the proximity of the head’s output circuit to the input of the oscilloscope’s amplifier. In a conventional, cabled environment, mismatches, unknown or unpredictable cable transmission properties and less than perfect connections all contribute to degradation of the signal between the calibrator output and the oscilloscope input. When using Active Heads, the calibrator output and the oscilloscope input are literally millimeters apart. This short distance comprises matched impedance, micro-strip transmission line and high quality BNC or SMA connectors to all but eliminate sources of degradation, distortion and uncertainty of calibration signals. An automatic internally switched 50Ωtermination eliminates the need for external terminators when connecting to high impedance oscilloscope inputs.

9560 – for ultimate performance

The introduction of the latest member of the Active Head family, 9560, once again underlines our commitment to oscilloscope calibration. With our continued focus on securing your investment, the 9560 Active Head is the latest product to fulfill this promise, allowing current users of the 9500 to upgrade their equipment to any 9500B status and take advantage of more recent product and performance enhancements. The 9560 is able to deliver 6 GHz leveled sine wave and pulse edges of only 70 ps. Unlike other oscilloscope calibrators, you’re not restricted to fixed amplitude pulses. Active Head Technology™ lets you adjust output amplitude between 4.44 mV and 3.1V, allowing you to check an oscilloscope’s amplifiers right down to their most sensitive ranges. Whatever amplitude you choose, controlled waveshape filtering ensures that all high-speed edges have an accurately defined harmonic energy distribution.

Complete Functionality

Vertical and horizontal deflection bandwidth

Fast return-to-ground edges with amplitudes between 4.44 mV and 3.1 V and rise/fall times of 70 ps, 150 ps or 500 ps check the pulse response and bandwidth of an oscilloscope’s vertical deflection/acquisition amplifiers. High level edges up to 210 V pk-pk check the dynamic performance of input attenuators. Leveled sinewaves up to 600 MHz, 1.1 GHz, 3.2 GHz or 6 GHz with an amplitude range of 4.44 mV to 5.56 V pk-pk into 50W (8.88 mV - 5.56 V pk-pk into 50W when using the 9560 Active Head) allow direct calibration of oscilloscope bandwidth. They also calibrate Z-axis and horizontal deflection bandwidth. Dual Sine outputs calibrate the oscilloscope’s trigger sensitivity and any other functions that normally require the insertion of a splitter into the connecting cable.

Vertical deflection gain

DC levels and 10 Hz to 100 kHz squarewaves are adjustable up to 220V with 5-digit amplitude resolution at 0.025% accuracy for dc and 0.05% for squarewaves – more than sufficient to calibrate the vertical deflection ranges of 12-bit digitizing and 14-bit interpolating oscilloscopes. The 9500B even checks the oscilloscope’s input impedance before applying high voltages in order to protect 50W input terminations. Automatic switching to 50Ω output impedance provides the same waveforms at amplitudes up to 5.56 V (except 9560 where source impedance is compensated for by re-scaling the minimum amplitude i.e., 8.88 mV - 5.56 V pk-pk into 50Ω).

Timebase accuracy

Timing markers cover the calibration of timebase ranges from 0.2 ns to 50 s per division. A choice of four styles, plus the ability to highlight every tenth marker by increasing its amplitude, provides optimum visibility on analog and digital storage oscilloscopes.

The square and pulse markers can also be used to calibrate timebase jitter. Complete with high-stability crystal reference, the 9500B calibrators have timing accuracy of ± 0.25 ppm – the level required to calibrate the latest DSOs.

Auxiliary calibration functions

The 9500B Auxiliary Function capabilities calibrate oscilloscope functions often overlooked on other calibrators.

  • DC and squarewave currents up to 100 mA calibrate current probes
  • Composite video signals test TV sync separator functions
  • Linear ramps calibrate trigger level markers and check DSOs for missing bits
  • High current 5 V to 20 V pulses test 50W terminator protection
  • Zero skew accurately aligns pulse edges to evaluate channel delays in multi-channel scopes
  • AUX IN routes external calibration waveforms to an Active Head’s BNC/SMA connector
  • Resistance and capacitance functions directly measure oscilloscope input impedance
  • Short/open circuit outputs allow testing of oscilloscope input leakage current
DC Voltage
   ± 1 mV to ± 200V into 1M Ω
   ± 1 mV to ± 5V into 50 Ω
   ± (0.025% + 25 µV)
   1, 2, 5 or 1, 2, 2.5, 4, 5 or continuous
   ± 11.2%


Range:  40 µV to 200V pk-pk into 1MΩ
   40 µV to 5V pk-pk into 50Ω
Polarity:  Positive, negative or symmetrical about ground
Accuracy (10 Hz to 10 kHz):  <1 mV ± (1% + 10 µV)
   1 mV-21 mV ± (0.10% + 10 µV)
Ranging:  1, 2, 5 or 1, 2, 2.5, 4, 5 or continuous
Deviation:  ± 11.2%
Rise/Fall Time
   <100V <150 ns
   >=100V <200 ns
   <2% peak for first 500 ns
Range:  10 Hz to 100 kHz
Accuracy:  ± 0.25 ppm
Ranging:  1, 2, 5 or 1, 2, 2.5, 4, 5 or continuous


Low-Edge Pulse
Range:  5 mV to 3V pk-pk into 50Ω
Accuracy:  +50 ps to -150 ps
Ranging:  1, 2, 5 or 1, 2, 2.5, 4, 5 or continuous
Rise/Fall Time
   500 ps return to ground
Mk/Sp Ratio
Aberrations (into VSWR 1.2:1)
   <± pk in 8Ghz
   <± 1.5% pk in 3Ghz
   (First 10ns)
Range:  10 Hz to 2 Mhz
Accuracy:  ± 0.25 ppm
Ranging:  1, 2, 5 or 1, 2, 2.5, 4, 5 or continuous


High-Edge Pulse
Range:  1mV to 200V pk-pk into 1 MΩ
   1mV to 5V pk-pk into 50Ω
Accuracy:  ± 3%
Ranging:  1, 2, 5 or 1, 2, 2.5, 4, 5 or continuous
Rise/Fall Time
   <100V <150 ns
   >=100V <200 ns
Mk/Sp Ratio
   <2% peak for first 500ns
Range:  10 Hz to 100 kHz
Accuracy:  ± 0.25 ppm
Ranging:  1, 2, 5 or 1, 2, 2.5, 4, 5 or continuous


Fast-Edge (only available on 9530 Active Heads)
Range:  5 mV to 3V pk-pk into 50Ω
Accuracy:  ± 3%
Ranging:  1, 2, 5 or 1, 2, 2.5, 4, 5 or continuous
Rise/Fall Time
   150 ps return to ground
Mk/Sp Ratio
   <3% peak in 8 Ghz
   <2% peak in 3 Ghz
   (First Ins)
Range:  10 Hz to 2 Mhz
Accuracy:  ± 0.25 ppm
Ranging:  1, 2, 5 or 1, 2, 2.5, 4, 5 or continuous


70ps Fast-Edge (only available on 9560 Active Heads)
Range:  25 mV to 2V pk-pk
Accuracy:  ± 3%
Ranging:  1, 2, 5 or 1, 2, 2.5, 4, 5 or continuous
Rise/Fall Time
   70 ps return to ground
Mk/Sp Ratio
   <± 4% peak in 20 Ghz
   <3% peak in 8 Ghz
   <1% peak in 3 Ghz
   (First 700 ps)
Range:  10 Hz to 1 Mhz
Accuracy:  ± 0.25 ppm
Ranging:  1, 2, 5 or 1, 2, 2.5, 4, 5 or continuous


25ps Fast-Edge (only available on 9550 Active Heads)
Range:  425 to 575 mV pk-pk into 50Ω
Accuracy:  ± 2%
Rise/Fall Time
   25 ps return to ground
Mk/Sp Ratio


Timing Markers
   Square/Sine, Pulse or Narrow Triangle
Period Square:  10 ns to 55s
Period Sine:  450 ps to 10ns
   9500/600 = 1ns to 10ns
   9560 = 180ps to 10ns
Period:  1 µs to 55s
Rise/Fall Time:  2.5% of period
Narrow Triangle
   1, 2, 5 or 1, 2, 2.5, 4, 5 or continuous for period of all waveshapes
Timing Accuracy
Normal:  ± 0.25 ppm
Timing Jitter
   10 ps pk-pk
   ± 45% for period
   100 mV to 1V pk-pk
   Every 10th marker can be set to higher amplitude for periods ± 1 µs for all waveshapes


Leveled Sine and Dual Sine
Range:  9500B/600 0.1 Hz to 600 MHz
   9500B/1100 0.1 Hz to 1.1 GHz
   9500B/3200 0.1 Hz to 3.2 GHz
   9500B/2200+9560 0.1Hz to 6.4 GHz
Amplitude (Leveled Sine into 50Ù)
0.1 Hz - 550 MHz  4.44 mV to 5.560V pk-pk
550 MHz - 2.5 GHz  4.44 mV to 3.336V pk-pk
2.5 GHz - 3.2 GHz  4.44 mV to 2.224V pk-pk
3.2 GHz - 6.4 GHz  25mV to 2 V pk-pk
Accuracy:  ± 1.5% at 50 kHz
Flatness (Leveled Sine relative to 50kHz)
0.1 Hz - 300 MHz  ± 2%
300 MHz - 550 MHz  ± 3%
550 MHz - 1.1 GHz  ± 4%
1.1 GHz - 3.2 GHz  ± 5%
3 GHz - 6.0 GHz  ± 5%
   1, 2, 5 or 1, 2, 2.5, 4, 5 or continuous
Sine Purity
2nd Harmonic  <-35 dBc
3rd Harmonic  <-40 dBc
All Other Spurious Signals  <-40 dBc (typical)


Input Impedance
Resistance Measurement (not available on 9550)
Range:  10Ω - 150Ω and 50 kΩ - 12 MΩ
Accuracy:  10 - 40 (W) ± 0.5%
   40 - 90 ± 0.1%
   90 - 150 ± 0.5%
   50k - 800k ± 0.5%
   800k - 1.2M ± 0.1%
   1.2M - 12M ± 0.5%
Capacitance Measurement (not available on 9550 or 9560 heads)
Range:  1 pF to 95 pF
Accuracy:  1 pF - 35 pF 2% ± 0.25 pF
   35 pF - 95 pF 3% ± 0.25 pF


DC:  ± 100 µA to ± 100 mA
Squarewave:  100 µA to 100 mA pk-pk
   ± (0.25% + 0.5 µA)
   10 Hz to 100 kHz
Accuracy:  ± 0.25 ppm
Ranging:  1, 2, 5 or 1, 2, 2.5, 4, 5 or continuous


Composite Video Output
   1.0V, 0.7V and 0.3V
   White, gray or black
Sync Polarity
   Positive or negative
   625-line 50 Hz or 525-line 60 Hz


LFLinear Ramp
   1V pk-pk sym. triangle
Ramp Time
   1 ms to 1s


Overload Pulse
   5V to 20V into 50Ω
   Positive or negative
   0.2s to 100s


Zero Skew
Unadjusted Skew
   ± 25 ps ch to ch
Adjusted Skew
   ± 5 ps ch to ch
Frequency Range
   10 Hz to 100 MHz


Short/Open Output
Output Leakage
Open Circuit:  ± 50 pA
Short Circuit:  ± 15 µV


Auxiliary Input
Signal Routing
   Rear i/p to any Active Head
Maximum Input
Voltage:  ± 40V pk-pk
Current:  ± 400 mA pk-pk
User Selectable:  f (up to 120 MHz), f/10 or f/100
Free Run:  100 Hz
Reference Frequency Input
Frequency Range:  1 MHz to 20 MHz in 1 MHz steps
Level:  90 mV to 1V pk-pk typ.
Lock Range:  ± 50 ppm
Reference Frequency Output
Frequency:  1 MHz or 10 MHz
Level:  Into 50W: 1V pk-pk (typical)


General Specifications
Operating:  5°C to 40°C
Storage:  0°C to 50°C
Humidity (non-condensing)
Operating:  <90% over 5°C to 30°C
   <75% over 30°C to 40°C
Storage:  <95% over 0°C to 50°C
Power, battery life
Voltage:  95V to 132V rms or 209V to 264V rms
Frequency:  48 Hz to 63 Hz
Consumption:  400 VA
Warm up Time
   20 minutes
Calibration Documentation 17025 accredited report of calibration included
Model 9500B Mainframe:  
H x W x D  133 x 427 x 440 mm
   (5.24 x 16.8 x 17.3 ins)
Weight:  12 kg (27 lbs) approx.
Modules 9510, 9530, 9550:  
H x W x D  65 x 31 x 140 mm
   (2.56 x 1.22 x 5.51 ins)
Weight:  0.45 kg (1-lb) approx.
   Designed to UL3111 and EN61010-1-1:1993/A2:1995.
   CE Marked
   EMC (including options)
Emissions:  EN55011/22
Immunity:  EN50082-1:1992
   FCC Rules part 15 sub-part J class B
Warranty Period
Mainframe:  1-year
Active Heads:  3-years


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